Cov Hluav Taws Xob Static Hluav Taws Xob hauv Microelectronics Clean Chav
Cov hluav taws xob zoo li qub yuav txo tau qhov zoo ntawm cov khoom siv hluav taws xob, electromagnetic cuam tshuam yuav cuam tshuam kev ua haujlwm ntawm cov khoom siv tsis siv neeg, thiab electrostatic adsorption yuav ua rau kom nyuaj ntawm kev sau cov khoom nto, yog li nws tseem tsim nyog los tswj cov tsim hluav taws xob zoo li qub. Vim tias cov nqi hluav taws xob electrostatic yeej nyiam cov khoom paug rau cov khoom lossis cov cuab yeej, electrostatic adsorption tau dhau los ua qhov tseem ceeb ntawm kev saib xyuas hauv chav huv. Piv txwv li, thaum 4-inch wafer raug them rau 1KV, lub zog adsorption rau cov khoom uas muaj txoj kab uas hla ntawm 1 micron yuav ncav cuag 830,000 phaus ib square inch. Yog li, electrostatic adsorption ntawm cov khoom them thiab cov khoom yuav muaj zog dua lub ntiajteb txawj nqus, aerodynamic rog, thiab adhesion rog.
Lub ntsiab tshwm sim ntawm hluav taws xob zoo li qub nyob rau hauv kev cob qhia huv hauv kev lag luam hluav taws xob muaj xws li:
1. nqus plua plav. Vim yog electrostatic adsorption, cov huab cua hauv cov chav huv si yog adsorbed rau ntawm qhov chaw ntawm cov khoom siv hluav taws xob thiab cov phab ntsa, cuam tshuam rau cov khoom zoo thiab kev huv. Cov hluav taws xob zoo li qub kuj tau dhau los ua qhov tshiab ntawm cov plua plav hauv chav huv.
2. Ua rau hluav taws kub thiab tawg. Ib qho loj ntawm cov nplaim hluav taws kub thiab tawg, kua thiab cov kuab tshuaj organic yog siv hauv chav huv huv hauv kev lag luam hluav taws xob. Cov hluav taws xob zoo li qub tuaj yeem dhau los ua qhov hluav taws kub ntawm cov pa roj (kua) thiab cov kuab tshuaj, ua rau hluav taws kub lossis tawg.
3. Corona tso tawm, lossis lub txim hluav taws xob tawm, tawm suab nrov thiab cuam tshuam nrog cov khoom siv hluav taws xob thiab cov khoom siv hluav taws xob.
4. Tsim ib qho chaw hluav taws xob electrostatic, ua rau luv luv, qaug zog lossis puas rau cov khoom siv hluav taws xob.
Vim li no, kev txhim kho txuas ntxiv ntawm thev naus laus zis hauv kev lag luam microelectronics kuj yog qhov tshwm sim ntawm kev txhim kho txuas ntxiv ntawm cov cuab yeej siv hluav taws xob zoo li qub. Cov ntsiab lus ntawm cov tshuab tiv thaiv electrostatic tau dhau los ua ntau thiab ntau dua. Ntxiv nrog rau cov txheej txheem kev tiv thaiv cov neeg ua haujlwm (cov khaub ncaws tiv thaiv zoo li qub, khau tiv thaiv zoo li qub, cov hlua tiv thaiv zoo li qub, thiab lwm yam), Ntxiv rau cov khoom siv tiv thaiv kev tiv thaiv xws li cov khoom siv tshem tawm zoo li qub, qhov yuav tsum tau ua ntxiv yog kev tsim kho. software electrostatic tiv thaiv systems.