Dab tsi yog qhov xwm txheej ntawm hluav taws xob zoo li cas rau IC ntim
Dab tsi yog qhov txaus ntshai ntawm hluav taws xob zoo li qub rau IC ntim khoom? Ua ntej tshaj plaws, qhov ua rau hluav taws xob zoo li qub tuaj yeem pom nyob txhua qhov chaw. Nrog txoj kev loj hlob sai ntawm kev tshawb fawb thiab thev naus laus zis thiab qib siab ntawm kev siv hluav taws xob hauv kev lag luam kev lag luam, cov phom sij ntawm hluav taws xob hauv hluav taws xob hauv kev lag luam twb pom tseeb lawm. Nws tuaj yeem ua rau ntau yam kev tiv thaiv, txwv kev txhim kho ntawm qib ntawm automation thiab cuam tshuam cov khoom zoo. Ntawm no yog cov laj thawj tseem ceeb ntawm kev tsim hluav taws xob zoo li qub txuas nrog cov xwm txheej tiag tiag ntawm peb lub Hoobkas hauv cov khoom sib txuas ua ke thiab kev tsim khoom.
1. Cov khoom siv tiv thaiv zoo siab feem ntau yog siv rau kev tsim kho thiab kho kom zoo nkauj hauv chaw ua haujlwm ntau lawm
Txheej txheem IC ntau lawm yuav tsum tau siv cov huv huv Rhiav lossis ultra-huv huv Rhiav. Qhov txheej loj qhov loj ntawm cov hmoov av-tshem tawm yog qhov yuav tsum tau hloov pauv ntawm yav dhau los 0.3μm mus rau 0.1μm, thiab qhov ceev ntawm hmoov av hmoov av yog li 353 hais / m3. Txog qhov kawg no, ntxiv rau kev teeb tsa ntawm ntau cov khoom siv sau cov plua plav, cov khoom ua kom tsis haum thiab cov plua plav organic yuav tsum siv los tiv thaiv hmoov av. Txawm li cas los xij, qhov hluav taws xob ua tau zoo ntawm cov ntaub ntawv tsim tsev tsis suav tias yog kev ntsuas. Tsis muaj kev qhia tshwj xeeb hauv kev tsim qauv tshwj xeeb rau kev ua haujlwm huv si ntawm kev lag luam kev lag luam. Cov ntaub ntawv kho kom zoo nkauj sab hauv tsuas yog siv hauv chav huv huv ntawm IC hoobkas yog: polyurethane elastic pem teb, nylon, tawv tawv yas, polyethylene, yas ntsa, ntawv yas, ntoo, dawb cov plooj (veneers) phaj, txha hniav laus, plaster thiab li ntawm. Feem ntau ntawm cov ntaub ntawv saum toj no yog cov polymer sib txuas lossis cov ntxig rau. Piv txwv, qhov tsis kam ntawm plexiglass lub cev yog 1012 ~ 1014Ωcm, thiab lub cev tsis kam ntawm polyethylene lub cev yog 1013 ~ 1015ncm. Yog li ntawd, tus conductivity yog qhov tsis zoo. Hluav taws xob zoo li qub vim qee qhov laj thawj tsis yooj yim rau xau rau lub ntiaj teb dhau ntawm lawv, uas ua rau kev sib txuam ntawm hluav taws xob zoo li qub.
2, tib neeg lub cev hluav taws xob zoo li qub
Cov kev ua sib txawv thiab taug kev rov qab los thiab tawm ntawm cov neeg teb xov tooj hauv chav huv, tsuas yog nkawm khau thiab hauv av tas li nyob sib ze thiab sib cais, thiab ntau qhov chaw ntawm tib neeg lub cev kuj tseem ua haujlwm thiab ua kom muaj kev sib txhuam. Txawm hais tias nws tau nrawm taug kev, taug kev qeeb, lossis trotting, hluav taws xob zoo li qub yuav tsim tawm, uas yog qhov tseem hu ua kev taug kev; tib neeg lub cev sawv tom qab tsiv. , Cov khaub ncaws ua haujlwm hnav los ntawm tib neeg lub cev thiab lub rooj zaum saum npoo yog sib cais tom qab kev sib cuag nrog lub rooj zaum saum npoo, thiab hluav taws xob zoo li qub kuj tseem yuav tsim tawm. Yog tias lub tshuab hluav taws xob hluav taws xob ntawm tib neeg lub cev tsis tuaj yeem raug tshem tawm thiab IC nti mus kov, nws yuav ua rau hluav taws xob IC tsis paub txog.
3. hluav taws xob zoo li qub los ntawm huab cua txias thiab huab cua ntshiab
Txij li thaum IC ntau lawm yuav tsum 45-55% RH, yuav tsum muaj cov cua txias thiab cov cua huv yuav tsum ua tib lub sijhawm. Lub tshuab lim dej tau xa mus rau chav huv chav los ntawm cov lim thawj, lim roj nruab nrab, lim ua hauj lwm siab thiab cov cua lim. Feem ntau, qhov cua ceev ntawm lub ntsiab huab cua ciav yog 8 ~ 10m / s, thiab sab hauv phab ntsa ntawm cov cua ntsawj ntsaws yog pleev xim. Thaum cov cua qhuav thiab cua lim, cov cua qhuav thiab lub lim lim txav sib txheeb ze rau txhua lwm yam, hluav taws xob zoo li qub yuav tsim tawm. Nws yuav tsum raug sau tseg tias hluav taws xob zoo li qub yog ntau rhiab rau av noo. Ntxiv rau, kev thauj mus los ntawm cov khoom tiav ib nrab thiab cov khoom lag luam IC yuav tsim hluav taws xob zoo nkauj thaum lub sijhawm ntim thiab tsheb thauj mus los, uas yog ib qho ntawm cov hluav taws xob zoo li qub.
Thib ob, hluav taws xob zoo li qub yog teeb meem heev rau IC. Feem ntau hais lus, hluav taws xob zoo li qub muaj cov yam ntxwv ntawm siab muaj peev xwm thiab hluav taws xob muaj zog hluav taws xob. Hauv cov txheej txheem ntawm hluav taws xob electrostatic them thiab tawm, hloov pauv siab tam sim no thiab qhov ntsuas hluav taws xob (EMP) qee zaum tsim, tsim hluav taws xob hluav taws xob hluav taws xob teb nrog qhov dav. Tsis tas li ntawd, piv nrog cov pa hluav taws xob muaj zog, lub zog ntawm electrostatic kuj tseem me me. Nyob rau hauv lub ntuj tso hluav taws xob-tso tawm cov txheej txheem, electrostatic paug (ESD) tsis dhau los tswj tsis tau, thiab nws yog txheej txheem random uas nyuaj rau rov ua dua. Yog li ntawd, nws lub luag haujlwm feem ntau cuam tshuam los ntawm tib neeg. Kav liam. Tshwj xeeb tshaj yog nyob rau hauv kev ua haujlwm ntawm cov tshuab microelectronics, qhov xwm txheej nws ua rau peb xav tsis thoob. Raws li cov lus ceeb toom, qhov kev lag luam ploj ncaj qha los ntawm hluav taws xob zoo li qub yog ntau txog ntau pua lab yuan txhua xyoo. Kev raug mob ntawm hluav taws xob zoo li qub tau dhau los ua ib qho kev cuam tshuam loj rau kev txhim kho kev lag luam microelectronics.
Hauv lub tshuab hluav taws xob semiconductor ntau lawm lub rooj sib tham, vim yog cov pa ntawm cov pa ntawm lub nti, cov pa hluav taws xob ntawm ICs, tshwj xeeb tshaj yog cov ntsuas loj sib xyaw ua ke (VLSI), yuav raug txo kom tsawg. Cov neeg khiav dej num hauv IC ntau lawm rhiav hnav huv tag nrho. Yog tias tib neeg lub cev tau them nrog hluav taws xob zoo li qub, nws yog ib qho yooj yim kom nqus plua plav thiab av. Yog tias cov hmoov av thiab cov hmoov av no tau coj los rau hauv qhov chaw ua haujlwm, nws yuav cuam tshuam rau cov khoom zoo, cov khoom lag luam tsis zoo, thiab txo Ic ntau heev Paib. Yog hais tias lub vojvoog ntawm adsorbed plua plav qhov ua haujlwm ntau dua 100 μm thiab cov kab dav dav yog li 100 μm, thaum zaj duab xis tuab yog qis dua 50 μm, cov khoom lag luam feem ntau yuav raug rho tawm.