Cov teebmeem Electrostatic (ESD)
1.1 Cov teeb meem ESD
Electrostatic discharge (ESE) yog qhov kev hloov ntawm kev tswj ntawm ob qho khoom ntawm cov khoom siv electrostatic txawv. Feem ntau tshwm sim ntawm ESD yog kev puas tsuaj rau khoom siv tsis zoo thiab khoom siv tsis ua haujlwm. Hauv kev lag luam thiab cov khoom siv hluav taws xob, nrog rau cov khoom siv kho mob lossis kho qhov muag, sau cov duab yeeb yam, xws li feem ntau tshwm sim. Yuav kom txo tau qhov tsis tau los ntawm electrostatic tawm, nws tau pom zoo kom siv lub sijhawm ua haujlwm los tiv thaiv kev ruaj ntseg.
1.2 ESD cov kev txhawj xeeb hauv kev lag luam
Hauv kev tsim cov tshuab hluav taws xob ntawm semiconductor, qhov geometry ntawm lub cuab yeej tau txais me thiab me me thiaj li ua tau raws li qhov kev xav tau ntawm kev siv lub tshuab, kev ua siab dua thiab khiav ceev ceev dua. Qhov no ua rau ntau dua ntawm cov cuab yeej sib ntau ntawm cov hluav taws xob ntawm cov hluav taws xob hauv lub semiconductor wafer, thiab ESD cov xwm txheej ua rau kev puas tsuaj los yog tsis ua hauj lwm los ntawm ntau lub tswv yim xws li yaj, hlau txheej nkev, thin oxide vias, thiab cov zoo li. ESD cov xwm txheej kuj tseem tuaj yeem degrade qhov zoo ntawm lub cuab yeej, tsim kom muaj kev txhim kho los yog "mob lag luam." Txawm hais tias cov cuab yeej muaj peev xwm dhau qhov kev xeem sim, nws yuav tsis poob ntxov.
Cov kev kho mob, kho qhov muag, thiab dielectric thin film industries tseem raug hu ua "static charges lossis electrostatic discharges." Thaum ib zaj duab xis tso rau hauv ib lub substrate, qhov kev tshwm sim electrostatic tuaj yeem tsim qhov khoom txhua lub sijhawm.
1.3 Feem cuam ntawm ESD ntawm cov khoom lag luam
ESD yuav tsis tsuas ua rau cov khoom xwb, tab sis ESD cov txheej xwm kuj yuav cuam tshuam cov khoom siv ntawm qhov khoom. Kev tswj cov cuab yeej ntawm ntau cov khoom siv cov khoom siv microprocessors, thiab ESD cov txheej xwm kuj tuaj yeem cuam tshuam cov khoom siv ntawm qhov khoom. Kev tswj cov khoom siv ntawm ntau cov khoom siv siv microprocessors, electromagnetic cuam tshuam (EMI) hluav taws xob los teebmeem los ntawm kev ua haujlwm ESD cov xwm txheej uas cuam tshuam nrog kev lag luam ntawm cov khoom siv zoo li no. Qhov kev cuam tshuam electromagnetic generated los ntawm ESD ib qho kev tshwm sim ntawm ib lub tshuab yuav cuam tshuam rau cov haujlwm ntawm cov chaw nyob ze.
Vim tias qhov kev lag luam ntawm kev tu vaj tse nce siab, lawv cov kev lag luam feem ntau tswj tau los ntawm kev tswj hwm kev tswj hwm ntawm lub hauv paus (FMS). Thaum ib qho xwm txheej ESD ua rau muaj teeb meem nrog ib qho ntaus ntawv, tag nrho cov lag luam raug cuam tshuam. Txawm hais tias lub tshuab kaw lawm feem ntau tsis yog teeb meem loj, nws tuaj yeem ua rau poob qis, txo kev ua haujlwm, thiab qee zaus cov khoom poob. Qhov ua tsis tiav ntawm kev tsim cov tshuaj yuav ua rau cov nqi ntau dua.